- Simplicity of operation
- Compatible with existing solid source MBE sytems
- 100% clean UHV construction.
- Non-toxic p doping
- Direct view of the C filament through integrated viewport
Hole concentration at 300K in C doped GaAs as a function of the temperature of the Carbon filament.
CARBON SUBLIMATION DOPING CELL:
A heated Pyrolitic Graphite filament generates a controlled flux of Carbon
Use of this type of doping source gives a hole concentration of between 1018 and 1020/cm3 in GaAs
OPERATING PRINCIPLE:
Carbon doping flux is determined by the filament temperature.
The low thermal mass of the filament permits rapid adjustment of the doping levels.
The filament emission area gives an excellent lateral uniformity for 2" and 3" substrates
A heated Pyrolitic Graphite filament generates a controlled flux of Carbon
Use of this type of doping source gives a hole concentration of between 1018 and 1020/cm3 in GaAs
OPERATING PRINCIPLE:
Carbon doping flux is determined by the filament temperature.
The low thermal mass of the filament permits rapid adjustment of the doping levels.
The filament emission area gives an excellent lateral uniformity for 2" and 3" substrates
ADVANTAGES:
(PUBLISHED RESULTS FOR CARBON DOPED III -V LAYERS)
On GaAs p doping up to 3 x 1019 /cm3 . (1)
AlGaAs/GaAs/InGaAs single QW lasers. (2)
GaAs planar barrier diodes. (3)
(1). J. Nagles , et al. , J. Cryst. Growth 111 (1991) 264-268
(2). M. Micovic, et al. , Appl. Phys. Lett. 64 (1994) 411
(3). Y Anand, et al. , Proc. IEEE GaAs Reliability Workshop, Miami Beach , Florida (1992)
SPECIFICATIONS:
| Source: | Strong High purity Pyrolitic Graphite (PG) |
| Material of construction: | PG, Ta, Mo |
| Doping range: | 10+14 - 10+20 / cm3 in GaAs |
| Optionnal Thermocouple (#): | On DN63CF: one C Type (WRe 5/26%) for reference on |
| Thermocouples: | Double C type (W Re 5/26%) |
| Connecting Flanges: | DN40CF DN63CF |
| Power consumption: | 400 - 950 Watts |
| WARRANTY: | Two years: Two years, exept PG filament |
(#): Because of the high temperature of the PG filament, the thermocouple cannot be used to control the temperature and serves only as a reference.
| Connecting Flange | Model Number | In vacuum O.D. * | In vacuum Length |
| DN40CF (70mm) | CF40-W | 36 mm (1,42") | 283 mm (11,14") |
| DN63CF (114 mm) | CF63-WW | 55 mm (2,17") | 215 mm (8,46") |