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| Specifications | Model Number | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| Responses of a usual (conventional) dopant cell and an ADDON 12 cc dopant cell for a 100°C temperature step | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Si Doping Cell (72 cc) | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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| Small and High Capacity Dopant Cell power consumption | Dopant Cell responses at various temperatures (72 cc) |
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| The cells for dopants must match specific requirements different from those for main materials: i.e. low quantities of source materials; evaporation at high temperature and a rapid reaction to a set point variation are often required. It is, therefore, better to use a cell specially designed for this purpose. ADDON presents three cells for dopants corresponding to the three classes of commonly used systems: · Monosubstrate: diameter 10 to 75 mm: crucible 5 cc (I.D. = 20mm) and 10° tap · Multisubstrate platen: diameter max. 120 mm: 12 cc (I.D. = 26mm) and 10° tap · Production Multisubstrate platen: diameter max. 360 mm: 72 cc (I.D. = 51mm) and 13° tap A low load is installed in these large diameter/large angle crucible cells to give a uniform flux. Furthermore, the combination of this low load with a suitable configuration of heating elements and thermal shielding gives a rapid response to temperature increases. In addition, the shutter position does not influence the temperature within the crucible. Recommended materials: This cell for dopants is especially suited for low/medium vapor pressure materials (T = 700 to 1400°C). For example: Si, Sn, Be, Y, Dy, Er, SnTe, PbTe. Compatibility: The cell exists in models fully compatible with existing systems manufactured by Varian, VG, Perkin-Elmer, DCA, Anelva and Riber. Other versions are available as an option (please provide us with details of flange size, connecting tube I.D. and in vacuum length). Thermocouples: The C type (W/Re 5/26%) is provided, unless there are special requirements. Power Units and Temperature Controller: Most existing power units are compatible. ADDON models are recommended if a new power unit is needed. Crucibles: 5, 12 and 72 cc crucibles are available, depending on the MBE system or application. The size of the crucible is calculated to achieve a uniformity of better than 1 %. Integrated shutter: An integrated shutter mechanism can be fitted on most of the cells described here. Integrated cooling circuit: If necessary a water cooling circuit can be integrated on most if the cells described here. *V100, RIBER 48/49 and EPINAT cells need a water cooling circuit which can be integrated on the cell flange or on a separate double flange. Please consult us.
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| * When needed Integrated Water Cooling can be added as a factory option (W). Do not hesitate to contact ADDON if your system is not listed above or if your system is a custom designed one. |
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