Guide for Source Selection by Element or Compound
Element or
compound
Temperature (°C) at vapor pressor in Torr Element
Melting Temp.
Recommanded
Cell
Element or
compound
Temperature (°C) at vapor pressor in Torr Element
Melting Temp.
Recommanded
Cell
10-8 10-6 10-4 10-8 10-6 10-4
Ag 574 685 832 962 Standard or
High Temp.
La 990 1212 1388 920 High Temp.
Al 685 812 972 660 New Al Li 235 306 404 180 Low Temp.
Amoniac ... ... ... ... Gas Injector Lu 870 1228 1376 1663 High Temp.
As 104 150 972 817 Valved Cracker
or Low Temp.
Metal Organic Compounds ... ... ... ... Low Temp.
Gas Cracker
Au 807 947 1132 1064 Standard or
High Temp.
Mg 185 246 327 650 Low Temp.
Arsine ... ... ... ... High Temp.
Gas Cracker
Mn 505 611 747 1246 Low Temp.
B 1282 1467 1707 2075 Dopant Cell or
High Temp.
N ... ... ... ... Rf Plasma or
Valved RF Plasma
Ba 272 354 462 727 Low Temp. Na 74 123 193 98 Low Temp.
BaF2 729 840 984 ... Double Zone
or High Temp.
Ni 927 1072 1262 1455 High Temp.
Be 707 832 997 1287 Dopant Cell O ... ... ... ... Rf Plasma or
Valved RF Plasma
Bi 329 409 517 271 Low Temp. Pred 54 88 129 White form
52
Valved Cracker
C 1657 1867 2136 3550 Carbon Doping PbSe 346 420 514 1065 Low Temp.
Ca 282 357 459 842 Low Temp. PbTe 339 413 508 917 Low Temp.
CaF2 817 938 1094 1360 Double Zone
or High Temp.
Pd 842 992 1192 1555 High Temp.
Cd 74 119 177 321 Low Temp. Posphine ... ... ... ... High Temp.
Gas Cracker
CdS 367 448 555 1750 Low Temp. Pt 1292 1492 1747 1768 High Temp.
CdSe 359 438 543 1264 Low Temp. S -10 17 55 115 Valved Cracker
CdTe 290 362 455 1098 Low Temp. Sb 279 345 425 631 Valved Cracker
or Low Temp.
Co 922 1067 1257 1495 High Temp. Sc 772 917 1107 1541 Double Zone
Cr 837 977 1157 1907 High Temp. Se 63 107 164 221 Valved Cracker
or
Low Temp.
Cu 722 852 1027 1085 Double Zone
or High Temp.
Si 992 1147 1337 1414 Si Source
Dy 625 747 897 1411 Double Zone
or High Temp.
Sn 682 807 997 232 Dopant Cell
Er 649 777 897 1529 Double Zone
or High Temp.
SnTe 314 384 473 780 Dopant Cell
Eu 283 361 466 822 Low Temp. Sr 241 309 404 777 Low Temp.
Fe 858 998 1180 1538 High Temp. Te 155 209 280 450 Valved Cracker
or
Low Temp.
Ga 619 742 907 30 Double Zone
or Standard
V 1162 1332 1547 1910 High Temp.
Ge 812 947 1137 938 Hot /Cold Zone or Cold Lip Y 957 1117 1332 1526 High Temp.
H ... ... ... ... RF Plasma or
Hydrogen Atomic or
Valved RF Plasma
Yb 247 317 417 824 Low Temp.
Hg 72 -44 7 -38,63 Special Hg
Valved Cell
Zn 123 177 247 420 Zn Sources
In 488 597 742 157 Double Zone
or Standard
ZnS 487 582 704 1830 Low Temp.
K 21 65 123 64 Low Temp. ZnTe 361 439 540 1238 Low Temp.