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for Oxides Growth |
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The figure shows the BEP pressure measured in a ZnO dedicated Riber Epineat system. The BEP measurements are performed at a constant Zn cell temperature. The BEP was measured before each ZnO growth run after ramping up the cell temperature. The Zn cell capacity is 85cm3 and is refilled with a single Zn small lump of 6 cm3 to simulate a nearly empty cell. As shown on the figure, the BEP was smoothly decaying from run to run. No BEP instability is observed along this runs period showing that the charge oxidation didn't occurs. |
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Zinc is easily evaporated in effusion cells as its vapour pressure is high at medium temperature (10-4 Torr @ 250 °C).
The difficulties arise when the deposition occurs in an oxygen partial pressure environment (10-4/10-5 Torr). A rapid oxidation of the zinc is observed and solid zinc oxides are formed which will restrict and clog the crucible mouth over few runs only. This oxide formation cannot be avoided and these oxides cannot be decomposed at available temperatures (more than 1 800 °C are necessary to start a decomposition of ZnO) To avoid the quick formation of ZnO Addon developed a dedicated Zinc source of various sizes and capacities. These sources decrease virtually to zero the contact between the oxygen and the zinc load. This permits to produce long term reproducible beams of zinc. The new design zinc source allows a good flux stability run after run. The use of this cell results in a stable process and allows reproducible growth recipes. Use: Zinc and other easily oxidable materials |
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Sources for VG systems have a water shield in standard version. Two channels PID/PS are recommends to power the sources. All Zn sources can be equipped with either an integrated shutter or a water shield or both : Consult Addon For each application ADDON can furnish a cell or a source tailored to your needs. Addon permanently strives to improve the quality of its products and services, the data given here may wary without notice |
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